JPH0457091B2 - - Google Patents

Info

Publication number
JPH0457091B2
JPH0457091B2 JP60236455A JP23645585A JPH0457091B2 JP H0457091 B2 JPH0457091 B2 JP H0457091B2 JP 60236455 A JP60236455 A JP 60236455A JP 23645585 A JP23645585 A JP 23645585A JP H0457091 B2 JPH0457091 B2 JP H0457091B2
Authority
JP
Japan
Prior art keywords
cathode
cathodes
substrate
polymer material
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60236455A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6297329A (ja
Inventor
Akira Ishibashi
Kyuzo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP23645585A priority Critical patent/JPS6297329A/ja
Publication of JPS6297329A publication Critical patent/JPS6297329A/ja
Publication of JPH0457091B2 publication Critical patent/JPH0457091B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP23645585A 1985-10-24 1985-10-24 ドライエツチング装置 Granted JPS6297329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23645585A JPS6297329A (ja) 1985-10-24 1985-10-24 ドライエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23645585A JPS6297329A (ja) 1985-10-24 1985-10-24 ドライエツチング装置

Publications (2)

Publication Number Publication Date
JPS6297329A JPS6297329A (ja) 1987-05-06
JPH0457091B2 true JPH0457091B2 (en]) 1992-09-10

Family

ID=17001000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23645585A Granted JPS6297329A (ja) 1985-10-24 1985-10-24 ドライエツチング装置

Country Status (1)

Country Link
JP (1) JPS6297329A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2790878B2 (ja) * 1988-11-16 1998-08-27 治久 木下 ドライプロセス装置
EP0428161B1 (en) * 1989-11-15 1999-02-17 Kokusai Electric Co., Ltd. Dry process system
JPH09144781A (ja) * 1995-09-19 1997-06-03 Aisin Seiki Co Ltd ディスクブレーキ用ロータ
JPH11141585A (ja) * 1997-11-05 1999-05-25 Aisin Seiki Co Ltd ディスクブレーキ用ロータ
EP1048872B1 (de) 1999-04-29 2003-11-12 Dr.Ing. h.c.F. Porsche Aktiengesellschaft Verfahren zur Auslegung einer Scheibenbremse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194532A (en) * 1981-05-26 1982-11-30 Nec Corp Selective etching for organic high molecule coupling substance
JPS6056076A (ja) * 1983-09-08 1985-04-01 Ulvac Corp スパツタエツチング装置
JPS60130186A (ja) * 1983-12-17 1985-07-11 Matsushita Electric Ind Co Ltd 半導体レ−ザ装置

Also Published As

Publication number Publication date
JPS6297329A (ja) 1987-05-06

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